silicon manufacture
...s in a very asymmetric way, and the Excite will classify this defect as a scratch. A low Cc value (meaning almost all the detectors saw the defect with the same G.L level more or less) points that the defect is probably a particle. As we can see, the first parameter we check after an event was detected is the Length parameter (P1). The Excite compares the defect’s length to the threshold of P1 and classifies it to a large scratch or a small scratch. If the measured length is above P1, meaning we eliminated the possibility of a small scratch, then the next parameter to check is the AR threshold for large scratch (P2). If the measured AR is above P2, meaning we eliminated the possibility of a particle, then the last parameter we check is the Cc threshold for large scratch (P7). If the measured Cc is above P7, the Excite classifies the defect as a large scratch. And if the measured Cc is lower than P7, the Excite classifies the defect as unknown (because it can’t be a small scratch, nor a particle). If on the second check (AR > P2), we saw the measured AR is not above the threshold value, it means the defect can be either particle or unknown. So the last check in this case would be the AR threshold for a particle (P6) and the defect classification will be according to the threshold value. The small scratch analysis (after the first check), is done the same way and the result can be in this case a defect classified as a sma...